Focused Ion Beam Assisted Nanofabrication – Patterned Growth of Carbon Nanotubes
نویسندگان
چکیده
منابع مشابه
Ion beam analyses of carbon nanotubes.
The utility of ion beam analysis (IBA) techniques to quantitatively determine impurities in carbon nanotubes (CNTs) over a wide range of atomic numbers is demonstrated. Such techniques have not previously been used to monitor impurities and their effects in this unique material. Despite the difficulty in mounting the samples (which generally are formed into a powdery aggregate rather in a thin ...
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In order to utilize the unique properties of carbon nanotubes in microelectronic devices, it is necessary to develop a technology which enables high yield, uniform, and preferential growth of perfectly aligned nanotubes. We demonstrate such a technology by using plasma-enhanced chemical-vapor deposition ~PECVD! of carbon nanotubes. By patterning the nickel catalyst, we have deposited uniform ar...
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Nanopatterned Pt by Ga+ focused ion beam (FIB) decomposition of an organometallic precursor forms low resistance ohmic contacts on 40–70 nm diameter GaN nanowires (NWs) grown by thermal reaction of Ga2O3 and NH3. With no intentional doping, the wires are presumed to be n-type. Thus, the linear I-V behavior is surprising since evaporated Pt usually forms Schottky barriers on n-GaN. Ohmic behavio...
متن کاملMorphology Control of Carbon Nanotubes through Focused Ion Beams
This research demonstrates the capability of controlled, focused ion beam (FIB)–assisted tailoring of morphologies in both multiwall carbon nanotubes (CNTs) and Y junction nonlinear CNT systems through defect engineering. We have shown that a 30 keV FIB Ga ion beam at low ion milling currents of 1 pA can be used to partially reduce the CNT diameter, to provide electrical conduction bottleneck m...
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Single-walled carbon nanotubes (SWCNTs) have attracted great interest in the last two decades because of their unique electrical, optical, thermal, mechanical properties, etc. One major research field of SWCNTs is the controlled growth of them from the patterned catalysts on substrates, since the integration of SWCNTs into nanoelectronics and other devices requires well-organized SWCNT arrays. ...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2002
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927602103783